Fabricating magnetic Co-Ni-C thin-film alloys by organometallic chemical vapor deposition

摘要

We have deposited CoxNiy-C films with a variety of compositions to verify dependence of the saturation magnetization on the composition. These experiments suggest that we can produce CoxNiy-C films with a variety of magnetic properties. The CoxNiy-C films were fabricated by ultraviolet decomposition of cobaltocene and nickelocene. We demonstrated that the photolytic decomposition of these metallocenes produces cyclopentadienyl (C5H5) species, consistent with recent studies of the energetics of the ligand metal bonds.